A PECVD System for High-level R&D.
- Company Name:Silicon Display Co., Ltd.
- Membership:Free Member
- Member Since:2008. 02.01
- Country/Region:Korea
- City:Gyeonggi-do
- Contact:Hong Joohyun
- Related Keywords:Machinery, PECVD System
Silicon Display Co., Ltd.
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- A PECVD System for High-level R&D.
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Contact us
Silicon Display Co., Ltd.
[Korea]
- Address
- Silicon Display Co., Ltd. 8, Tapsil-ro 58beon-gil, Giheung-gu, Yongin-si Gyeonggi-do
- Phone
- 82-31-2740091
- Contact name
- Hong Joohyun
Quick Information
- Place of Origin: Korea
Description
Applications
Hydrogenated amorphous silicon (a-SiH), silicon-nitride (SiNx) Silicon oxide (SiO2) n+ a-SiH, p+ a-SiH, SiNxOy, amorphous carbon, etc.
Features
Sample size 150 x 50 mm 2 or 8 inch Loading and unloading Robot controlled Maximum suscepter temperature =450 °C RF generator 13.56 MHz (600 W)
Performance
Good thickness uniformity 5% High-quality thin-films
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