Silicon Display Co., Ltd.

A Sputtering System

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Silicon Display Co., Ltd.
[Korea]

Address
Silicon Display Co., Ltd. 8, Tapsil-ro 58beon-gil, Giheung-gu, Yongin-si Gyeonggi-do
Phone
82-31-2740091
Contact name
Hong Joohyun

Quick Information

  • Place of Origin: Korea

Description

Applications

Cr, Al, ITO, Mo. W, Etc.c.

Features

  • Target size: up to 8 inch
  • Sample size: up to 150 x 50 mm 2 or 8 inch
  • Loading and unloading: Robot controlled
  • Hot wall or substrate heating (option)
  • DC or RF type

Performance

Good uniformity: 8 inch (≤ 5 %)


Product Image

  • A Sputtering System  image

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