Silicon Display Co., Ltd.

A RIE Etching System for Uniform Etching

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Silicon Display Co., Ltd.
[Korea]

Address
Silicon Display Co., Ltd. 8, Tapsil-ro 58beon-gil, Giheung-gu, Yongin-si Gyeonggi-do
Phone
82-31-2740091
Contact name
Hong Joohyun

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Product Details

Quick Information

  • Place of Origin: Korea

Description

Applications

Dry etching : SiNx, a-Si:H, n+ a-Si:H, BCB, PR, SiO2, Al, etc.

Features

  • Sample size: 150 x 50 mm 2 or 8 inch
  • Loading and unloading: Robot controlled
  • Hot wall
  • RF generator

Performance

Good uniformity: ≤ 5 %


Product Image

  • A RIE Etching System for Uniform Etching image

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